枚葉轉盤式濺鍍機Springon
電洽
【Introduction】
Industry : EMI coating/ Cosmetic coating
Features : High deposition rate
Application : Metal thin film sputtering for EMI
適用產業:EMI 鍍膜/SDC 外觀鍍膜
機器特色:高鍍率/移動電漿磁控靶
適用場合:金屬鍍膜應用
【Specification】
Chambers : 2V~4V
Substrate size : 550L*480W*50H (mm)
Cycle time : 40~60sec, depend on process require
Application : Al/Cu/SS/Cr...
Up time : 94%
Vertical / Horizontal type
Target utilization : 40%
Uniformity : ± 5~12%